Synergistic effects of deformation and solid-state reactions in Si with buried glass layer initiated by annealing in non-isothermal reactor.
| Autor: | Denisenko, Yuri I. |
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| Zdroj: | Proceedings of SPIE; 3/26/2019, Vol. 11022, p1-8, 8p |
| Databáze: | Complementary Index |
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