Autor: |
Yi-Jr Su, Liang-Jen Huang, Hsin-Wei Chen, Bo-Yi Liao, Chia-Feng Chang, Lee-Jene Lai, Shih-Hung Chang |
Předmět: |
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Zdroj: |
AIP Conference Proceedings; 2018, Vol. 2054 Issue 1, p060051-1-060051-4, 4p |
Abstrakt: |
The design of a compact chamber incorporating multiple functions for a soft X-ray beamline at Taiwan Photon Source is described. This chamber installed to assist the commissioning of the beamline is composed of three major parts: a diagnostic system, an alignment system and a differential pumping system. The capability of the diagnostic system includes flux measurement, monitoring the photon beam, fluorescence imaging and energy calibration of the plane gratings. An alignment system with a diode laser serves to optimize the optical elements at the endstation. The differential pumping system assures a vacuum protection, with beamline pressure kept below 10-9 Torr while the pressure of experimental chambers increased to 10-6 Torr. [ABSTRACT FROM AUTHOR] |
Databáze: |
Complementary Index |
Externí odkaz: |
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