Feasibility of monitoring a multiple e-beam tool using scatterometry and machine learning: stitching error detection.
| Autor: | Rademaker, Guido, Blancquaert, Yoann, Labbaye, Thibault, Mourier, Lucie, Figueiro, Nivea, Sanchez, Francisco, Koret, Roy, Pradelles, Jonathan, Landis, Stéfan, Rey, Stéphane, Haupt, Ronny, Bringoltz, Barak, Shifrin, Michael, Kandel, Daniel, Ger, Avron, Sendelbach, Matthew, Wolfling, Shay, Pain, Laurent |
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| Zdroj: | Proceedings of SPIE; 7/22/2018, Vol. 10775, p1-7, 7p |
| Databáze: | Complementary Index |
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