Thin films for high-resolution, 3-color lithography.
| Autor: | Gutierrez Razo, Sandra A., Pranda, Adam, Liaros, Nikolaos, Cohen, Samuel R., Fourkas, John T., Oehrlein, Gottlieb S., Ogden, Hannah M., Mullin, Amy, Wolf, Steven M., Falvey, Daniel, Petersen, John |
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| Zdroj: | Proceedings of SPIE; 1/12/2018, Vol. 10584, p1-7, 7p |
| Databáze: | Complementary Index |
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