Performance of a Nanoimprint Mask Replication System.
| Autor: | Atsushi Kimura, Kohei Imoto, Chiaki Sato, Kiyohito Yamamoto, Hiroshi Inada, Mitsuru Hiura, Takehiko Iwanaga, Aghili, Ali, Makoto Mizuno, Jin Choi, Jones, Chris |
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| Zdroj: | Proceedings of SPIE; 1/12/2018, Vol. 10584, p1-7, 7p |
| Databáze: | Complementary Index |
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