Polymer Brush as Adhesion Promoter for EUV Patterning.
| Autor: | Jing Guo, De Silva, Anuja, Mignot, Yann, Yongan Xu, de la pena, Abraham Arceo, Meli, Luciana, Seshadri, Indira, Metzler, Dominik, Singh, Lovejeet, Tsuyoshi Furukawa, Ayothi, Ramakrishnan, Felix, Nelson M., Corliss, Daniel |
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| Zdroj: | Proceedings of SPIE; 1/14/2018, Vol. 10586, p1-12, 12p |
| Databáze: | Complementary Index |
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