Accelerated lifetime tests and failure analysis of an electro-thermally actuated MEMS valve.
| Autor: | Skima, H., Medjaher, K., Varnier, C., Zerhouni, N., Dedu, E., Bourgeois, J. |
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| Zdroj: | 2015 27th International Conference on Microelectronics (ICM); 2015, p75-78, 4p |
| Databáze: | Complementary Index |
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