Nonlinear mechanical springs for counteracting nonlinearities in gap-closing electrostatic actuators.
| Autor: | Rivlin, Ben, Shmulevich, Shai, Joffe, Aharon, Elata, David |
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| Zdroj: | 2015 16th International Conference on Thermal, Mechanical & Multi-Physics Simulation & Experiments in Microelectronics & Microsystems; 2015, p1-6, 6p |
| Databáze: | Complementary Index |
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