| Autor: |
Siu, Karen K.-W., Nikulin, Andrei Y., Zaumseil, Peter, Yamazaki, Hiroshi, Ishikawa, Tetsuya |
| Předmět: |
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| Zdroj: |
Journal of Applied Physics; 7/15/2003, Vol. 94 Issue 2, p1007, 6p, 1 Diagram, 4 Graphs |
| Abstrakt: |
An experimental-analytical technique for the model-independent nondestructive characterization of single crystal alloys is applied to SiGe(C)/Si(C) superlattice structures with different positions of substitutional carbon. The technique is based on the retrieval of the phase of the diffracted x-ray wave via a logarithmic dispersion relation, with subsequent determination of the complex crystal structure factor utilizing limited a priori knowledge of the superlattice structure. High-resolution, x-ray Bragg diffraction profiles were collected using a rotating anode source. The studies have allowed the reconstruction of the complex crystal structure factor as a function of crystal depth, permitting direct observation of strain relaxation in individual layers of the superlattice structure. © 2003 American Institute of Physics. [ABSTRACT FROM AUTHOR] |
| Databáze: |
Complementary Index |
| Externí odkaz: |
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