Study of SF6/N2O Microwave Plasma for Surface Texturing of Multicrystalline (<150 µm) Solar Substrates.

Autor: Chan, Boon Teik, Kunnen, Eddy, Uhlig, Matthias, Marneffe, Jean-Francois de, Xu, Kaidong, Boullart, Werner, Rau, Bernd, Poortmans, Jef
Zdroj: Japanese Journal of Applied Physics; Oct2012, Vol. 51 Issue 10S, p1-1, 1p
Abstrakt: Surface texturing is an imperative process to reduce the reflection of the incident light on solar cells, by enhancing sunlight diffusion into the silicon solar cells for photon generation. As a result, the current generation can be increased. In this study, the plasma texturing process with linear microwave plasma sources has been benchmarked with the industrial acidic iso-texturing process on 156×156 mm2 multicrystalline substrates. By optimizing the plasma texturing parameters, the absolute solar cells efficiency can be increased by 4.9% for 150 µm thickness silicon substrate. The proposed process offers a significant advantage over the standard acidic iso-texturing without major modification in the existing industrial solar cells manufacturing sequence. In order to explain plasma-induced surface morphology changes, the Kardar–Parisi–Zhang (KPZ), Pétri–Brault, and Jason–Drotar models are used. [ABSTRACT FROM AUTHOR]
Databáze: Complementary Index