| Autor: |
Hung, Jeng-Nan, Hocheng, Hong, Sato, Kazuo |
| Zdroj: |
Japanese Journal of Applied Physics; Jun2011, Vol. 50 Issue 6S, p1-1, 1p |
| Abstrakt: |
In the rapid advancement of micro/nano-electro-mechanical systems (MEMS/NEMS) technology, however, the reliable applications lie in the characterization of the mechanical fatigue properties of the micro/nano-structures. This paper presents the fatigue life of polycrystalline silicon (poly-Si) cross-microbridge in torsion. The torsion testing specimens are fabricated by surface and bulk micromachining. In addition, the stresses of cross-microbridge structures are investigated at various dimensions. The numerical tool ANSYS is applied to calculate the stress distribution of the testing structure. The experimental fatigue life lies between 7.78×104–1.48×107 cycles in use of the MTS Tytron 250 microforce testing system. The collective plot of poly-Si fatigue including the results of torsion will provide the MEMS device designer and researcher a good reference in the future applications. [ABSTRACT FROM AUTHOR] |
| Databáze: |
Complementary Index |
| Externí odkaz: |
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