Abrasive-free chemical-mechanical planarization (CMP) of gold for thin film nano-patterning.

Autor:	Gherman R; Institut Interdisciplinaire d'Innovation Technologique (3IT), Université de Sherbrooke, 3000 Boulevard de l'université, Sherbrooke, J1K 0A5 Québec, Canada. serge.ecoffey@usherbrooke.ca.; Laboratoire Nanotechnologies Nanosystèmes (LN2)-IRL3463, CNRS, Université de Sherbrooke, Sherbrooke, J1K 0A5 Québec, Canada., Beaudin G; Institut Interdisciplinaire d'Innovation Technologique (3IT), Université de Sherbrooke, 3000 Boulevard de l'université, Sherbrooke, J1K 0A5 Québec, Canada. serge.ecoffey@usherbrooke.ca.; Laboratoire Nanotechnologies Nanosystèmes (LN2)-IRL3463, CNRS, Université de Sherbrooke, Sherbrooke, J1K 0A5 Québec, Canada., Stricher R; Institut Interdisciplinaire d'Innovation Technologique (3IT), Université de Sherbrooke, 3000 Boulevard de l'université, Sherbrooke, J1K 0A5 Québec, Canada. serge.ecoffey@usherbrooke.ca.; Laboratoire Nanotechnologies Nanosystèmes (LN2)-IRL3463, CNRS, Université de Sherbrooke, Sherbrooke, J1K 0A5 Québec, Canada., Bryche JF; Institut Interdisciplinaire d'Innovation Technologique (3IT), Université de Sherbrooke, 3000 Boulevard de l'université, Sherbrooke, J1K 0A5 Québec, Canada. serge.ecoffey@usherbrooke.ca.; Laboratoire Nanotechnologies Nanosystèmes (LN2)-IRL3463, CNRS, Université de Sherbrooke, Sherbrooke, J1K 0A5 Québec, Canada., Levesque P; Institute for Quantum Computing, University of Waterloo, Waterloo, Ontario, Canada, N2L 3G1., Fillion-Gourdeau F; Institute for Quantum Computing, University of Waterloo, Waterloo, Ontario, Canada, N2L 3G1.; Infinite Potential Laboratories, Waterloo, Ontario, Canada, N2L 0A9., MacLean SG; Institute for Quantum Computing, University of Waterloo, Waterloo, Ontario, Canada, N2L 3G1.; Infinite Potential Laboratories, Waterloo, Ontario, Canada, N2L 0A9.; Université du Québec, INRS-Énergie, Matériaux et Télécommunications, Varennes, Québec, Canada J3X 1S2., Drouin D; Institut Interdisciplinaire d'Innovation Technologique (3IT), Université de Sherbrooke, 3000 Boulevard de l'université, Sherbrooke, J1K 0A5 Québec, Canada. serge.ecoffey@usherbrooke.ca.; Laboratoire Nanotechnologies Nanosystèmes (LN2)-IRL3463, CNRS, Université de Sherbrooke, Sherbrooke, J1K 0A5 Québec, Canada., Charette PG; Institut Interdisciplinaire d'Innovation Technologique (3IT), Université de Sherbrooke, 3000 Boulevard de l'université, Sherbrooke, J1K 0A5 Québec, Canada. serge.ecoffey@usherbrooke.ca.; Laboratoire Nanotechnologies Nanosystèmes (LN2)-IRL3463, CNRS, Université de Sherbrooke, Sherbrooke, J1K 0A5 Québec, Canada., Ecoffey S; Institut Interdisciplinaire d'Innovation Technologique (3IT), Université de Sherbrooke, 3000 Boulevard de l'université, Sherbrooke, J1K 0A5 Québec, Canada. serge.ecoffey@usherbrooke.ca.; Laboratoire Nanotechnologies Nanosystèmes (LN2)-IRL3463, CNRS, Université de Sherbrooke, Sherbrooke, J1K 0A5 Québec, Canada.
Jazyk:	angličtina
Zdroj:	Nanoscale [Nanoscale] 2024 Sep 19; Vol. 16 (36), pp. 16861-16869. Date of Electronic Publication: 2024 Sep 19.
DOI:	10.1039/d4nr02610a
Abstrakt:	Despite high demand for gold film nanostructuring, patterning gold at the nanoscale still presents considerable challenges for current foundry-compatible processes. Here, we present a method based on abrasive-free chemical mechanical planarization (CMP) to planarize nanostructured gold surfaces with high selectivity against SiO 2 . The method is efficient in a damascene process and industry-compatible. Investigations into the material removal mechanism explore the effects of CMP parameters and show that the material removal rate is highly tunable with changes in slurry composition. Millimeter-scale arrays of gold nanostructures embedded in SiO 2 were fabricated and the planarization dynamics were monitored over time, leading to the identification of distinct planarization phases and their correlation with the material removal mechanism. Finally, plasmonic cavities of gold nanostructure arrays over a gold mirror were fabricated. The cavities exhibited efficient plasmonic resonance in the visible range, aligning well with simulation results.
Databáze:	MEDLINE
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