Elastic Properties of Low-Dimensional Single-Crystalline Dielectric Oxides through Controlled Large-Area Wrinkle Generation.

Autor:	Meng Q; School of Materials Science and Engineering, UNSW, Sydney 2052, NSW, Australia., Shi J; School of Materials Science and Engineering, UNSW, Sydney 2052, NSW, Australia., Zhang J; School of Materials Science and Engineering, UNSW, Sydney 2052, NSW, Australia., Liu Y; School of Materials Science and Engineering, UNSW, Sydney 2052, NSW, Australia., Wang W; School of Materials Science and Engineering, UNSW, Sydney 2052, NSW, Australia., Webster RF; Electron Microscope Unit, Mark Wainwright Analytical Centre, UNSW, Sydney 2052, NSW, Australia., Zhao D; School of Materials Science and Engineering, UNSW, Sydney 2052, NSW, Australia., Zhu Y; School of Materials Science and Engineering, UNSW, Sydney 2052, NSW, Australia., Hao B; School of Materials Science and Engineering, UNSW, Sydney 2052, NSW, Australia., Qu B; School of Materials Science and Engineering, UNSW, Sydney 2052, NSW, Australia.; UNSW Materials & Manufacturing Futures Institute, UNSW, Sydney 2052, NSW, Australia., Lin X; School of Materials Science and Engineering, UNSW, Sydney 2052, NSW, Australia.; UNSW Materials & Manufacturing Futures Institute, UNSW, Sydney 2052, NSW, Australia., Lin CH; School of Materials Science and Engineering, UNSW, Sydney 2052, NSW, Australia., Qiao L; School of Physics, University of Electronic Science and Technology of China, Chengdu, Sichuan 611731, China., Zu X; School of Physics, University of Electronic Science and Technology of China, Chengdu, Sichuan 611731, China., Huang JK; Department of Systems Engineering, City University of Hong Kong, Kowloon 999077, Hong Kong SAR, China., Li W; School of Materials Science and Engineering, UNSW, Sydney 2052, NSW, Australia., Wang D; School of Materials Science and Engineering, UNSW, Sydney 2052, NSW, Australia., Yang J; School of Materials Science and Engineering, UNSW, Sydney 2052, NSW, Australia.; UNSW Materials & Manufacturing Futures Institute, UNSW, Sydney 2052, NSW, Australia., Li S; School of Materials Science and Engineering, UNSW, Sydney 2052, NSW, Australia.; UNSW Materials & Manufacturing Futures Institute, UNSW, Sydney 2052, NSW, Australia.
Jazyk:	angličtina
Zdroj:	ACS applied materials & interfaces [ACS Appl Mater Interfaces] 2024 Jun 05; Vol. 16 (22), pp. 28980-28990. Date of Electronic Publication: 2024 May 20.
DOI:	10.1021/acsami.4c00260
Abstrakt:	Freestanding single-crystalline SrTiO 3 membranes, as high-κ dielectrics, hold significant promise as the gate dielectric in two-dimensional (2D) flexible electronics. Nevertheless, the mechanical properties of the SrTiO 3 membranes, such as elasticity, remain a critical piece of the puzzle to adequately address the viability of their applications in flexible devices. Here, we report statistical analysis on plane-strain effective Young's modulus of large-area SrTiO 3 membranes (5 × 5 mm 2 ) over a series of thicknesses (from 6.5 to 32.2 nm), taking advantage of a highly efficient buckling-based method, which reveals its evident thickness-dependent behavior ranging from 46.01 to 227.17 GPa. Based on microscopic and theoretical results, we elucidate these thickness-dependent behaviors and statistical data deviation with a bilayer model, which consists of a surface layer and a bulk-like layer. The analytical results show that the ∼3.1 nm surface layer has a significant elastic softening compared to the bulk-like layer, while the extracted modulus of the bulk-like layer shows a variation of ∼40 GPa. This variation is considered as a combined contribution from oxygen deficiency presenting in SrTiO 3 membranes, and the alignment between applied strain and the crystal orientation. Upon comparison of the extracted elastic properties and electrostatic control capability to those of other typical gate dielectrics, the superior performance of single-crystalline SrTiO 3 membranes has been revealed in the context of flexible gate dielectrics, indicating the significant potential of their application in high-performance flexible 2D electronics.
Databáze:	MEDLINE
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