Hybrid Metrology for Nanostructured Optical Metasurfaces.

Autor:	Murataj I; Advanced Materials and Life Science Division, Istituto Nazionale Ricerca Metrologica (INRiM), Strada delle Cacce 91, 10135, Torino, Italy.; Dipartimento di Scienza Applicata e Tecnologia, Politecnico di Torino, Corso Duca degli Abruzzi, 24, 10129, Torino, Italy., Angelini A; Advanced Materials and Life Science Division, Istituto Nazionale Ricerca Metrologica (INRiM), Strada delle Cacce 91, 10135, Torino, Italy., Cara E; Advanced Materials and Life Science Division, Istituto Nazionale Ricerca Metrologica (INRiM), Strada delle Cacce 91, 10135, Torino, Italy., Porro S; Dipartimento di Scienza Applicata e Tecnologia, Politecnico di Torino, Corso Duca degli Abruzzi, 24, 10129, Torino, Italy., Beckhoff B; Physikalisch-Technische Bundesanstalt (PTB), Abbestraße 2-12, 10587, Berlin, Germany., Kayser Y; Physikalisch-Technische Bundesanstalt (PTB), Abbestraße 2-12, 10587, Berlin, Germany., Hönicke P; Physikalisch-Technische Bundesanstalt (PTB), Abbestraße 2-12, 10587, Berlin, Germany., Ciesielski R; Physikalisch-Technische Bundesanstalt (PTB), Abbestraße 2-12, 10587, Berlin, Germany., Gollwitzer C; Physikalisch-Technische Bundesanstalt (PTB), Abbestraße 2-12, 10587, Berlin, Germany., Soltwisch V; Physikalisch-Technische Bundesanstalt (PTB), Abbestraße 2-12, 10587, Berlin, Germany., Perez-Murano F; IMB-CNM CSIC, Carrer dels Til·lers, 08193, Barcelona, Spain., Fernandez-Regulez M; IMB-CNM CSIC, Carrer dels Til·lers, 08193, Barcelona, Spain., Carignano S; ICCUB, Universitat de Barcelona, Carrer Martí i Franquès, 1, 08028, Barcelona, Spain., Boarino L; Advanced Materials and Life Science Division, Istituto Nazionale Ricerca Metrologica (INRiM), Strada delle Cacce 91, 10135, Torino, Italy., Castellino M; Dipartimento di Scienza Applicata e Tecnologia, Politecnico di Torino, Corso Duca degli Abruzzi, 24, 10129, Torino, Italy., Ferrarese Lupi F; Advanced Materials and Life Science Division, Istituto Nazionale Ricerca Metrologica (INRiM), Strada delle Cacce 91, 10135, Torino, Italy.
Jazyk:	angličtina
Zdroj:	ACS applied materials & interfaces [ACS Appl Mater Interfaces] 2023 Dec 20; Vol. 15 (50), pp. 57992-58002. Date of Electronic Publication: 2023 Nov 22.
DOI:	10.1021/acsami.3c13923
Abstrakt:	Metasurfaces have garnered increasing research interest in recent years due to their remarkable advantages, such as efficient miniaturization and novel functionalities compared to traditional optical elements such as lenses and filters. These advantages have facilitated their rapid commercial deployment. Recent advancements in nanofabrication have enabled the reduction of optical metasurface dimensions to the nanometer scale, expanding their capabilities to cover visible wavelengths. However, the pursuit of large-scale manufacturing of metasurfaces with customizable functions presents challenges in controlling the dimensions and composition of the constituent dielectric materials. To address these challenges, the combination of block copolymer (BCP) self-assembly and sequential infiltration synthesis (SIS), offers an alternative for fabrication of high-resolution dielectric nanostructures with tailored composition and optical functionalities. However, the absence of metrological techniques capable of providing precise and reliable characterization of the refractive index of dielectric nanostructures persists. This study introduces a hybrid metrology strategy that integrates complementary synchrotron-based traceable X-ray techniques to achieve comprehensive material characterization for the determination of the refractive index on the nanoscale. To establish correlations between material functionality and their underlying chemical, compositional and dimensional properties, TiO 2 nanostructures model systems were fabricated by SIS of BCPs. The results from synchrotron-based analyses were integrated into physical models, serving as a validation scheme for laboratory-scale measurements to determine effective refractive indices of the nanoscale dielectric materials.
Databáze:	MEDLINE
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