Passivation efficacy study of Al 2 O 3 dielectric on self-catalyzed molecular beam epitaxially grown GaAs 1- x Sb x nanowires.
Autor: | Parakh M; Nanoengineering, Joint School of Nanoscience and Nanoengineering, North Carolina A&T State University, Greensboro NC, 27401, United States of Americ a., Ramaswamy P; Department of Electrical and Computer Engineering, North Carolina A&T State University, Greensboro NC, 27411, United States of America., Devkota S; Nanoengineering, Joint School of Nanoscience and Nanoengineering, North Carolina A&T State University, Greensboro NC, 27401, United States of Americ a., Kuchoor H; Nanoengineering, Joint School of Nanoscience and Nanoengineering, North Carolina A&T State University, Greensboro NC, 27401, United States of Americ a., Dawkins K; Nanoengineering, Joint School of Nanoscience and Nanoengineering, North Carolina A&T State University, Greensboro NC, 27401, United States of Americ a., Iyer S; Nanoengineering, Joint School of Nanoscience and Nanoengineering, North Carolina A&T State University, Greensboro NC, 27401, United States of Americ a. |
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Jazyk: | angličtina |
Zdroj: | Nanotechnology [Nanotechnology] 2022 May 11; Vol. 33 (31). Date of Electronic Publication: 2022 May 11. |
DOI: | 10.1088/1361-6528/ac69f8 |
Abstrakt: | This work evaluates the passivation efficacy of thermal atomic layer deposited (ALD) Al (© 2022 IOP Publishing Ltd.) |
Databáze: | MEDLINE |
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