A multi-ion plasma FIB study: Determining ion implantation depths of Xe, N, O and Ar in tungsten via atom probe tomography.

Autor: Eder K; Australian Centre for Microscopy and Microanalysis, The University of Sydney, Sydney Australia; School of Aerospace, Mechanical and Mechatronic Engineering, The University of Sydney, Sydney Australia. Electronic address: katja.eder@sydney.edu.au., Bhatia V; Australian Centre for Microscopy and Microanalysis, The University of Sydney, Sydney Australia., Qu J; Australian Centre for Microscopy and Microanalysis, The University of Sydney, Sydney Australia; School of Aerospace, Mechanical and Mechatronic Engineering, The University of Sydney, Sydney Australia., Van Leer B; Thermo Fisher Scientific, 5350 NE Dawson Creek Drive, Hillsboro OR USA., Dutka M; Thermo Fisher Scientific, Eindhoven, Netherlands., Cairney JM; Australian Centre for Microscopy and Microanalysis, The University of Sydney, Sydney Australia; School of Aerospace, Mechanical and Mechatronic Engineering, The University of Sydney, Sydney Australia.
Jazyk: angličtina
Zdroj: Ultramicroscopy [Ultramicroscopy] 2021 Sep; Vol. 228, pp. 113334. Date of Electronic Publication: 2021 May 30.
DOI: 10.1016/j.ultramic.2021.113334
Abstrakt: In this study atom probe tomography was used to determine the implantation depth of four different plasma FIB ion species - xenon, argon, nitrogen, and oxygen - implanted at different acceleration voltages. It was found that lowering the beam energy reduces the implantation depth, but significant implantation was still observed for N, O and Ar at beam energies as low as 2 kV. Furthermore, nitrides and oxides were observed that were formed when using N and O. Xe had the lowest implantation depth compared to Ar, N and O when using the same conditions. No Xe ions were detected in the sample prepared at 2 kV. Experimentally-determined implantation depths were compared to calculated implantation depths. The experiments exhibited deeper-than-predicted ion implantation into the microstructure, but lower-than-predicted ion concentrations.
(Copyright © 2021. Published by Elsevier B.V.)
Databáze: MEDLINE
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