Novel Carbon-Cage-Based Ultralow-k Materials: Modeling and First Experiments.
| Autor: | Zagorodniy, Kostyantyn1, Chumakov, Dmytro2 dmytro.chumakov@amd.com, Täschner, Christine1, Lukowiak, Anna3, Stegmann, Heiko4, Schmeisser, Dieter5, Geisler, Holm2, Engelmann, Hans-Juergen2, Hermann, Helmut1, Zschech, Ehrenfried2 |
|---|---|
| Zdroj: | IEEE Transactions on Semiconductor Manufacturing. Nov2008, Vol. 21 Issue 4, p646-660. 15p. 3 Charts, 11 Graphs. |
| Databáze: | Business Source Ultimate |
| Externí odkaz: |
|