Crystallographic dependent in-situ CBr4 selective nano-area etching and local regrowth of InP/InGaAs by MOVPE.
| Autor: | Kuznetsova, N.1 naku@fotonik.dtu.dk, Kulkova, I.V.1, Semenova, E.S.1, Kadhodazadeh, S.2, Kryzhanovskaya, N.V.3, Zhukov, A.E3, Yvind, K.1 |
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| Zdroj: | Journal of Crystal Growth. Nov2014, Vol. 406, p111-115. 5p. |
| Databáze: | Academic Search Ultimate |
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