Influence of desorption on the composition of high-temperature superconducting thin films during magnetron sputtering.

Autor:	Vorob’ev, A. K., Gaponov, S. V., Drozdov, M. N., Klyuenkov, E. B., Luchin, V. I., Masterov, D. V.
Zdroj:	Technical Physics Letters. Dec98, Vol. 24 Issue 12, p952. 2p.
Databáze:	Academic Search Ultimate
Externí odkaz:	Zobrazit plný text záznamu