Structural Transformations and Silicon Nanocrystallite Formation in SiO[sub x] Films.
| Autor: | Bratus’, V. Ya., Yukhimchuk, V. A., Berezhinsky, L. I., Valakh, M. Ya., Vorona, I. P., Indutnyi, I. Z., Petrenko, T. T., Shepeliavyı, P. E., Yanchuk, I. B. |
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| Zdroj: | Semiconductors. Jul2001, Vol. 35 Issue 7, p821. 6p. |
| Databáze: | Academic Search Ultimate |
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