Monoclinic B-phase erbium sesquioxide (Er2O3) thin films by filtered cathodic arc deposition

Autor: Adelhelm, Christoph1 christoph.adelhelm@ipp.mpg.de, Pickert, Thomas1, Balden, Martin1, Rasinski, Marcin1,2, Plocinski, Tomasz2, Ziebert, Carlos3, Koch, Freimut1 freimut.koch@ipp.mpg.de, Maier, Hans1
Zdroj: Scripta Materialia. Oct2009, Vol. 61 Issue 8, p789-792. 4p.
Databáze: Academic Search Ultimate