Monoclinic B-phase erbium sesquioxide (Er2O3) thin films by filtered cathodic arc deposition
Autor: | Adelhelm, Christoph1 christoph.adelhelm@ipp.mpg.de, Pickert, Thomas1, Balden, Martin1, Rasinski, Marcin1,2, Plocinski, Tomasz2, Ziebert, Carlos3, Koch, Freimut1 freimut.koch@ipp.mpg.de, Maier, Hans1 |
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Zdroj: | Scripta Materialia. Oct2009, Vol. 61 Issue 8, p789-792. 4p. |
Databáze: | Academic Search Ultimate |
Externí odkaz: |