Capacitance-voltage and Auger chemical profile studies on AlGaN/GaN structures passivated by SiO2/Si3N4 and SiNx/Si3N4 bilayers.
Autor: | Adamowicz, Bogusława1 Boguslawa.Adamowicz@polsl.pl, Miczek, Marcin1,2, Hashizume, Tamotsu2, Klimasek, Andrzej1, Bobek, Piotr1, Żywicki, Janusz3 |
---|---|
Zdroj: | Optica Applicata. 2007, Vol. 37 Issue 4, p327-334. 8p. 1 Diagram, 4 Graphs. |
Databáze: | Academic Search Ultimate |
Externí odkaz: |