Characteristics of a cylindrical magnetron and reactive sputtering of binary compound films.
| Autor: | Goncharov, A. A.1, Demchishin, A. V.1, Demchishin, A. A.1, Kostin, E. G.1, Michenko, V. A.1, Stetsenko, B. V.1 stetsen@iop.kiev.ua, Ternovoĭ, E. G.1, Shchurenko, A. I.1 |
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| Zdroj: | Technical Physics. Aug2007, Vol. 52 Issue 8, p1073-1078. 6p. 1 Diagram, 6 Graphs. |
| Databáze: | Academic Search Ultimate |
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