Mass-spectrometric investigations of gas evolution from silicon in electron beam melting.

Autor: Asnis, Yu. A.1, Baranskii, P. I.2, Babich, V. M.2, Zabolotin, S. P.1, Ptushinskii, Yu. G.3, Sukretnyi, V. G.3
Zdroj: Semiconductor Physics, Quantum Electronics & Optoelectronics. 2006, Vol. 9 Issue 2, p4-7. 4p.
Databáze: Academic Search Ultimate