Silicon–carbon films deposited at low substrate temperature
| Autor: | Ambrosone, G.1,2, Coscia, U.1,2 coscia@na.infn.it, Lettieri, S.1,2, Maddalena, P.1,2, Noce, M. Della3, Ferrero, S.4, Restello, S.5, Rigato, V.5, Tucci, M.6 |
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| Zdroj: | Journal of Non-Crystalline Solids. Jun2006, Vol. 352 Issue 9-20, p1371-1375. 5p. |
| Databáze: | Academic Search Ultimate |
| Externí odkaz: |
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