Deposition of Sm2O3 doped CeO2 thin films from Ce(DPM)4 and Sm(DPM)3 (DPM=2,2,6,6-tetramethyl-3,5-heptanedionato) by aerosol-assisted metal–organic chemical vapor deposition

Autor: Jiang, Yinzhu1, Song, Haizheng1, Ma, Qianli1, Meng, Guangyao mgym@ustc.edu.cn
Zdroj: Thin Solid Films. Jul2006, Vol. 510 Issue 1/2, p88-94. 7p.
Databáze: Academic Search Ultimate