Deposition of Sm2O3 doped CeO2 thin films from Ce(DPM)4 and Sm(DPM)3 (DPM=2,2,6,6-tetramethyl-3,5-heptanedionato) by aerosol-assisted metal–organic chemical vapor deposition
Autor: | Jiang, Yinzhu1, Song, Haizheng1, Ma, Qianli1, Meng, Guangyao mgym@ustc.edu.cn |
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Zdroj: | Thin Solid Films. Jul2006, Vol. 510 Issue 1/2, p88-94. 7p. |
Databáze: | Academic Search Ultimate |
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