Substrate dependence of the self-heating in lead zirconate titanate (PZT) MEMS actuators.
| Autor: | Song, Yiwen1 (AUTHOR), Kang, Kyuhwe1 (AUTHOR), Tipsawat, Pannawit2 (AUTHOR), Cheng, Christopher Y.2 (AUTHOR), Zhu, Wanlin2 (AUTHOR), LaBella, Michael2 (AUTHOR), Choi, Sukwon1 (AUTHOR) sukwon.choi@psu.edu, Trolier-McKinstry, Susan E.2 (AUTHOR) stmckinstry@psu.edu |
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| Zdroj: | Journal of Applied Physics. 4/28/2024, Vol. 135 Issue 16, p1-7. 7p. |
| Databáze: | Academic Search Ultimate |
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