Study on Bonding Technology of Silicon-Based Lithium Tantalate Heterogeneous Wafers.
| Autor: | CHEN Zheming1, DING Yuchong1 dingyuchong@163.com, ZOU Shaohong1, LONG Yong1, SHI Zibin1, MA Jinyi1 |
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| Zdroj: | Journal of Synthetic Crystals. Apr2024, Vol. 53 Issue 4, p634-640. 7p. |
| Databáze: | Academic Search Ultimate |
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