Investigation of the Plasma-Chemical Synthesis of Thin Ga2O3 Films Doped with Zn in One Step in Plasma.

Autor: Mochalov, L. A.1 (AUTHOR), Kudryashov, M. A.1 (AUTHOR), Prokhorov, I. O.1 (AUTHOR) igorprokhorov1998@yandex.ru, Vshivtsev, M. A.1 (AUTHOR), Kudryashova, Yu. P.1 (AUTHOR), Slapovskaya, E. A.1 (AUTHOR), Knyazev, A.V.1 (AUTHOR)
Zdroj: High Energy Chemistry. Dec2023, Vol. 57 Issue 6, p509-514. 6p.
Databáze: Academic Search Ultimate
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