Novel mode-coupling vibrations of AlN thin film bulk acoustic resonator operating with thickness-extensional mode.
| Autor: | Zhao, Zinan1,2 (AUTHOR), Li, Nian3 (AUTHOR), Qu, Yilin4 (AUTHOR), Chen, Weiqiu1,2 (AUTHOR) chenwq@zju.edu.cn |
|---|---|
| Zdroj: | Applied Mathematics & Mechanics. Dec2023, Vol. 44 Issue 12, p2187-2206. 20p. |
| Databáze: | Academic Search Ultimate |
| Externí odkaz: |
|