Theoretical analysis and modeling of the obtaining of polycrystalline silicon in a fluidized-bed reactor.

Autor: Borodulya, V. A.1, Vinogradov, L. M.1, Rabinovich, O. S.1, Akulich, A. V.1
Zdroj: Journal of Engineering Physics & Thermophysics. Jan2005, Vol. 78 Issue 1, p47-53. 7p.
Databáze: Academic Search Ultimate