Electrothermal actuation of NEMS resonators: Modeling and experimental validation.
| Autor: | Ma, Monan1 (AUTHOR) monan@bu.edu, Ekinci, K. L.1 (AUTHOR) ekinci@bu.edu |
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| Zdroj: | Journal of Applied Physics. 8/21/2023, Vol. 134 Issue 7, p1-13. 13p. |
| Databáze: | Academic Search Ultimate |
| Externí odkaz: |
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