Field Measurement and CFD Simulation Investigation on Airflow Parallelism of a Cleanroom for Optical Fabs.

Autor: Permana, Indra1, Fujen Wang2, Agharid, Alya Penta3
Zdroj: ASHRAE Transactions. 2023, Vol. 129 Issue Part1, p561-568. 8p.
Databáze: Academic Search Ultimate