Distribution and Burgers vectors of dislocations in semiconductor wafers investigated by rocking- curve imaging.
| Autor: | Lübbert, Daniel1 daniel.luebbert@gmx.de, Ferrari, Claudio2, Mikulík, Petr3,4, Pernot, Petra3,5, Helfen, Lukas3,5, Verdi, Nicola2, Korytár, Dušan3,6, Baumbach, Tilo3 |
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| Zdroj: | Journal of Applied Crystallography. Feb2005, Vol. 38 Issue 1, p91-96. 6p. 5 Diagrams. |
| Databáze: | Academic Search Ultimate |
| Externí odkaz: |
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