SIMS Analysis of Ultrathin Implanted Arsenic Layers in Silicon.
| Autor: | Kibalov, D. S.1 IBTec@rambler.ru, Orlov, O. M.1, Simakin, S. G.1, Smirnov, V. K.1 |
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| Zdroj: | Technical Physics Letters. Nov2004, Vol. 30 Issue 11, p897-899. 3p. |
| Databáze: | Academic Search Ultimate |
| Externí odkaz: |
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