Nano/microlevel Surface Roughness Measurement of Polycrystalline Silicon Solar Wafer with the Laser Speckle Technique.

Autor: PRAKASAM, R.1, BALAMURUGAN, R.1 balamurugan.r.sci@kct.ac.in
Zdroj: Lasers in Engineering (Old City Publishing). 2020, Vol. 45 Issue 4-6, p325-335. 11p.
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