Influence of heat treatment on the structural, morphological and optical properties of DC magnetron sputtered TiSiO films.

Autor: ADDEPALLI, SURESH suresh181083@gmail.com, SUDA, UTHANNA1
Zdroj: Bulletin of Materials Science. Jun2016, Vol. 39 Issue 3, p789-795. 7p.
Databáze: Academic Search Ultimate