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pro vyhledávání: '"von Blanckenhage, G."'
Autor:
van Hattum, E.D., Louis, Eric, van der Westen, A., Salle, P., Zoethout, E., von Blanckenhage, G., Enkish, H., Müllender, Stephan, Bijkerk, Frederik
Publikováno v:
SPIE Advanced Lithography 2010
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=narcis______::f4c431ef2dc4808340c96bac4df30dbc
https://research.utwente.nl/en/publications/high-reflectance-multilayer-coating-technology-for-3100-euvl-projection-optics(3f7ec705-1f33-46c6-a14d-586629de1acf).html
https://research.utwente.nl/en/publications/high-reflectance-multilayer-coating-technology-for-3100-euvl-projection-optics(3f7ec705-1f33-46c6-a14d-586629de1acf).html
