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55‐2: Roll‐to‐Plate Nanoimprint Lithography as Etching Mask Creating Large‐Area Structured Surfaces.
Autor:
ter Meulen, Jan Matthijs, Veldhuizen, L.W., van der Heijden, Danielle A.C., Ercan, Erhan, Titulaer, Bram J.F.
Publikováno v:
SID Symposium Digest of Technical Papers; Jun2022, Vol. 53 Issue 1, p727-728, 2p
