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Publikováno v:
1998 5th International Conference on Solid-State and Integrated Circuit Technology. Proceedings (Cat. No.98EX105).
High power excimer laser annealing is used to activate dopants implanted in polysilicon layers. Sheet resistances as low os 50 /spl Omega///spl square/ are achieved for thin polysilicon layers on oxide, and low ohmic contacts have been produced to im
Publikováno v:
Solid State Ionics, 45(1-2), 93-100. Elsevier
The ion exchange properties of Na-β-alumina were studied. Samples of Na-β-alumina treated in a CaCl 2 melt at 1173 K and then examined with X-ray energy dispersive spectroscopy. We were able to exchange the sodium ions completely for bivalent calci
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::04eb027c0639322fa1768fa494396fc1
https://research.tue.nl/nl/publications/904e61b1-6e83-45dd-b6da-b9160525f89b
https://research.tue.nl/nl/publications/904e61b1-6e83-45dd-b6da-b9160525f89b