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Application of hot-wire chemical vapor-deposited Si:H films in thin film transistors and solar cells
Autor:
Rath, Jatindra K *, Stannowski, Bernd, van Veenendaal, Patrick A.T.T, van Veen, Marieke K, Schropp, Ruud E.I
Publikováno v:
In Thin Solid Films 3 September 2001 395(1-2):320-329