Zobrazeno 1 - 2
of 2
pro vyhledávání: '"van Mjm Marcel Sambeek"'
Autor:
MB Marc Hoppenbrouwers, van Mjm Marcel Sambeek, Rjmm Rob Snijkers, Gmw Gerrit Kroesen, de Fj Frits Hoog
Publikováno v:
Journal of Applied Physics, 79(12), 8982-8992. American Institute of Physics
The ion energy distributions (IEDs) at the electrodes in a capacitively coupled 13.56 MHz plasma in CF4 have been measured mass resolved with a Balzers quadrupole in combination with a home-built energy analyzer. Mass-resolved determination offers th
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::f77b0daa714771d493066840fff60650
https://doi.org/10.1063/1.362630
https://doi.org/10.1063/1.362630
Publikováno v:
Applied Physics Letters, 63(3), 308-310. American Institute of Physics
The mass‐resolved ion energy distribution (IED) at the grounded electrode has been determined in a 13.56‐MHz parallel‐plate plasma in argon. The IED is determined of Ar+, Ar2+, Ar2+, ArH+, H3O+, and H3+ for several plasma conditions. At pressur
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::0ba4738476daa0f6085a56f54d303245
https://doi.org/10.1063/1.110087
https://doi.org/10.1063/1.110087