High-Performance Operation and Solder Reflow Compatibility in BEOL-Integrated 16-Kb HfO₂: Si-Based 1T-1C FeRAM Arrays

Autor: Francois, T., Coignus, J., Makosiej, A., Giraud, B., Carabasse, C., Barbot, J., Martin, S., Castellani, N., Magis, T., Grampeix, H., van Duijn, S., Mounet, C., Chiquet, P., Schroeder, U., Slesazeck, S., Mikolajick, T., Nowak, E., Bocquet, Marc, Barrett, N., Andrieu, F., Grenouillet, L.

Publikováno v: IEEE Transactions on Electron Devices
IEEE Transactions on Electron Devices, 2022, pp.1-7. ⟨10.1109/TED.2021.3138360⟩

International audience; 16kbit 1T-1C FeRAM arrays are demonstrated at 130nm node with TiN/HfO2:Si/TiN ferroelectric capacitors integrated in the Back-End-of-Line (BEOL). 0 state and 1 state distributions measured on the arrays demonstrate perfect yie

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=dedup_wf_001::741ad4caacdd64bceb9f3b9ad0c5e3b9
https://hal.science/hal-03596923/document

16kbit HfO 2 :Si-based 1T-1C FeRAM Arrays Demonstrating High Performance Operation and Solder Reflow Compatibility

Autor: Francois, T, Coignus, J, Makosiej, A, Giraud, B, Carabasse, C, Barbot, J, Martin, S, Castellani, N, Magis, T, Grampeix, H, van Duijn, S, Mounet, C, Chiquet, P, Schroeder, U, Slesazeck, S, Mikolajick, T, Nowak, E, Bocquet, Marc, Barrett, N, Andrieu, F, Grenouillet, L

Publikováno v: 67th Annual IEEE International Electron Devices Meeting (IEDM) 2021
67th Annual IEEE International Electron Devices Meeting (IEDM) 2021, Dec 2021, San Francisco, United States. ⟨10.1109/IEDM19574.2021.9720640⟩

International audience; 16kbit 1T-1C FeRAM arrays are demonstrated at 130nm node with TiN/HfO2:Si/TiN ferroelectric capacitors integrated in the Back-End-of-Line (BEOL). Zero bit failure is reported at the array level, with memory window fully open d

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::e7326dae07046b0245f54383ffd6f4a9
https://hal.science/hal-03596974

Talma booklet Geïntegreerde zorg:Eerste inhoudelijke verdieping (mei 2016)

Autor: Bannink, D.B.D., van Duijn, S., Schonewille, A., Thomese, Fleur

Publikováno v: Bannink, D B D, van Duijn, S, Schonewille, A & Thomese, F 2016, Talma booklet Geïntegreerde zorg : Eerste inhoudelijke verdieping (mei 2016) . Vrije Universiteit, Talma instituut .

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=od______4612::d1ab59b2261577aca46dd39e5071bd92
https://hdl.handle.net/1871.1/397b4e3f-5118-4e91-972f-7ff530ffcac6

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