Zobrazeno 1 - 3
of 3
pro vyhledávání: '"ultrasonic pressure detection"'
Publikováno v:
Sensors, Vol 19, Iss 2, p 406 (2019)
This study describes a novel fiber optic extrinsic Fabry–Perot interferometric (EFPI) ultrasonic sensor comprising a low-cost and high-performance silicon diaphragm. A vibrating diaphragm, 5 μm thick, was fabricated by using the Microelectromechan
Externí odkaz:
https://doaj.org/article/7190cd77b6be4b7ab64c653d63b50806
Publikováno v:
Sensors
Volume 19
Issue 2
Sensors (Basel, Switzerland)
Sensors, Vol 19, Iss 2, p 406 (2019)
Volume 19
Issue 2
Sensors (Basel, Switzerland)
Sensors, Vol 19, Iss 2, p 406 (2019)
This study describes a novel fiber optic extrinsic Fabry&ndash
Perot interferometric (EFPI) ultrasonic sensor comprising a low-cost and high-performance silicon diaphragm. A vibrating diaphragm, 5 &mu
m thick, was fabricated by using the Mi
Perot interferometric (EFPI) ultrasonic sensor comprising a low-cost and high-performance silicon diaphragm. A vibrating diaphragm, 5 &mu
m thick, was fabricated by using the Mi
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::98e5946896ddd26d56c63f6d769d6096
https://doi.org/10.3390/s19020406
https://doi.org/10.3390/s19020406
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