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pro vyhledávání: '"tepelně stimulovaná emise exoelektronů"'
Autor:
Avotina, Liga, Bumbure, Lada, Goldmane, Annija Elizabete, Vanags, Edgars, Romanova, Marina, Sorokins, Hermanis, Zaslavskis, Aleksandrs, Kizane, Gunta, Dekhtyar, Yuri
Publikováno v:
2022 International Conference on Applied Electronics (AE).
ERDF project No. 1.1.1.1/20/A/109 “Planar field emission microtriode structure” Magnetron sputtered tungsten and tungsten diboride nanofilms are proposed to be used in microelectronic devices. Methods of deposition for nanofilms on oxidized silic