Comparisons between Membrane, Bridge and Cantilever Miniaturized Resistive Vacuum Gauges

Autor: Kasun Gardiye Punchihewa, Evan Zaker, Rade Kuljic, Koushik Banerjee, Tatjana Dankovic, Alan Feinerman, Heinz Busta

Publikováno v: Sensors, Vol 12, Iss 7, Pp 8770-8781 (2012)

Using bulk micromachining, meander-shaped resistor elements consisting of 20 nm Cr and 200 nm Au were fabricated on 1 µm thick silicon nitride membranes, bridges, and cantilevers. The resistance change as a function of pressure depends strongly on t

Externí odkaz: https://doaj.org/article/da428f483fdc4a7999767f28000bb375

Comparisons between membrane, bridge and cantilever miniaturized resistive vacuum gauges

Autor: Heinz H. Busta, Evan Zaker, Kasun Punchihewa, Koushik Banerjee, Tatjana Dankovic, Rade Kuljic, Alan Feinerman

Publikováno v: Sensors (Basel, Switzerland)
Sensors
Volume 12
Issue 7
Pages 8770-8781
Sensors, Vol 12, Iss 7, Pp 8770-8781 (2012)

Using bulk micromachining, meander-shaped resistor elements consisting of 20 nm Cr and 200 nm Au were fabricated on 1 µm thick silicon nitride membranes, bridges, and cantilevers. The resistance change as a function of pressure depends strongly on t

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::c66881ae37672ec55b96419e4d34d05c
https://pubmed.ncbi.nlm.nih.gov/23012516

Polymeric mask protection for alternative KOH silicon wet etching

Autor: Matteo Cocuzza, Marzia Quaglio, Simone Luigi Marasso, Candido Pirri, Giancarlo Canavese, Carlo Ricciardi

Publikováno v: Journal of micromechanics and microengineering
17 (2007): 1387–1393. doi:10.1088/0960-1317/17/7/022
info:cnr-pdr/source/autori:Canavese G.; Marasso S.L.; Quaglio M.; Cocuzza M.; Ricciardi C.; Pirri C.F./titolo:Polymeric mask protection for alternative KOH silicon wet etching/doi:10.1088%2F0960-1317%2F17%2F7%2F022/rivista:Journal of micromechanics and microengineering (Print)/anno:2007/pagina_da:1387/pagina_a:1393/intervallo_pagine:1387–1393/volume:17

A new cost-effective setup for silicon bulk micromachining is presented which makes use of a polymeric protective coating, ProTEK® B2 coating, instead of a conventional hardmask. Different concentrations of KOH and bath conditions (pure, with surfac

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::355586642626f6a9448d9785f93e80f7

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