Zobrazeno 1 - 1
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pro vyhledávání: '"plasmatické čištění"'
Autor:
Rudolfová, Zdena
This thesis concentrates on the methodology of semiconductor samples preparation for low voltage scanning electron microscopy. In the first part a detailed theory of sample imaging using electron beam and difference between classical scanning electro
Externí odkaz:
http://www.nusl.cz/ntk/nusl-230351