Zobrazeno 1 - 10
of 95
pro vyhledávání: '"piezoresistive microcantilever"'
Publikováno v:
Nano Express, Vol 4, Iss 3, p 035007 (2023)
Microelectromechanical systems (MEMS)-based piezoresistive nanomechanical sensors are compact sensing platforms widely employed in vapor sensing, environmental monitoring, and biosensing. Despite their extensive utility, their lower sensitivity relat
Externí odkaz:
https://doaj.org/article/bbadd7ac682b4af18fab6557c85ac351
Akademický článek
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Publikováno v:
Sensors, Vol 21, Iss 4, p 1118 (2021)
In this paper, a polyimide (PI)/Si/SiO2-based piezoresistive microcantilever biosensor was developed to achieve a trace level detection for aflatoxin B1. To take advantage of both the high piezoresistance coefficient of single-crystal silicon and the
Externí odkaz:
https://doaj.org/article/94c4ce596eb5446aa5b0dfc3c9b185f1
Publikováno v:
Micromachines, Vol 11, Iss 11, p 1001 (2020)
This paper introduces a piezoresistive microcantilever with a low spring constant. The microcantilever was fabricated with titanium (Ti) as the piezoresistor, a low spring constant polyimide (PI) layer, and a thin silicon oxide (SiO2) layer as the to
Externí odkaz:
https://doaj.org/article/ba994e77a63646fe8dd18aba7afdd934
Publikováno v:
Sensors, Vol 20, Iss 9, p 2508 (2020)
Liquid-borne particles sampling and cantilever-based mass detection are widely applied in many industrial and scientific fields e.g., in the detection of physical, chemical, and biological particles, and disease diagnostics, etc. Microscopic analysis
Externí odkaz:
https://doaj.org/article/112d48c0536c4749b9cbff10a227aa5e
Akademický článek
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Autor:
Long-Sun Huang, Chuin-Shan Chen, Yotsapoom Pheanpanitporn, Wei-Ting Hong, Yu-Cheng Lai, Yi-Kuang Yen
Publikováno v:
Sensors, Vol 13, Iss 8, Pp 9653-9668 (2013)
This study demonstrates a novel method for electrical detection of C-reactive protein (CRP) as a means of identifying an infection in the body, or as a cardiovascular disease risk assay. The method uses a single free-standing, thermally controlled pi
Externí odkaz:
https://doaj.org/article/ad59483757af42fd9ee80c0b4606480e
Publikováno v:
Biosensors, Vol 8, Iss 1, p 18 (2018)
Here, we provide a method and apparatus for real-time compensation of the thermal effect of single free-standing piezoresistive microcantilever-based biosensors. The sensor chip contained an on-chip fixed piezoresistor that served as a temperature se
Externí odkaz:
https://doaj.org/article/74066e95d12541f0a1525f6c66663a6b
Autor:
Xu, Jiushuai, Peiner, Erwin
Publikováno v:
Advanced MEMS/NEMS Fabrication and Sensors, S. 19-47
Microcantilevers are the most simplified Microelectromechanical Systems (MEMS) based devices. Resonant piezoresistive silicon microcantilevers (PMCs) coated with sensitive materials, especially the PMCs patterned with sensing nanostructures of large
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::6ef40c0dc6941bae76e649e73b79a625
Publikováno v:
Journal of Measurements in Engineering, Vol 4, Iss 1, Pp 7-14 (2016)
An impact base excitation method with stacked PZT actuator for MEMS dynamic characterization was studied. A typical impact base excitation device mainly includes a stacked PZT actuator, a base structure and an impulse power source. The principle of t